Original Date: 11/03/1996
Revision Date: 01/18/2007
Best Practice : Radio Frequency Test and Evaluation Facility
Created through a contract with SEMATECH, the Radio Frequency Test and Evaluation facility evaluates and benchmarks radio frequency components used in material processing. The facility established a record of industrial successes through its use of advanced, high-powered sensors; surrogate plasma loads; and modeling and testing techniques.
The Radio Frequency Test and Evaluation facility provides high-power capabilities (1 MHz to 60 GHz); models for transmitters, matching networks, antennas, and nonisotropic materials; and precision test equipment (milliwatts to megawatts). In addition, the facility possesses extensive engineering and fabrication capabilities. Because of its expertise, equipment, and capabilities, the Radio Frequency Test and Evaluation facility can test and evaluate all aspects of a radio frequency system. Diagnostic capabilities include phase-locked network analyzers for impedance measurements; a vector spectrum analyzer for frequency and harmonic measurements; and calorimetry and electrical techniques for accurate and repeatable power measurements. In addition, radio frequency components can be evaluated as a function of power, impedance, and/or frequency.
The radio frequency/microwave technology has shown success in numerous commercial industries. The chemical processing industry can manufacture specialty glass and accelerate the drying of polymers, recycling sorbents, and SiOx plasma deposition. The waste processing industry can vitrify low level waste and remove contamination from concrete surfaces. The paper industry can enhance the removal of lignon. The ceramics industry can sinter and anneal armor tiles. The semiconductor industry can process plasma.
The Radio Frequency Test and Evaluation facility also has several potential applications for military purposes. These include test and evaluation of communication and radar systems; and plasma processing for manufacturing computer chips and flat plate panel displays.
Oak Ridge is a recognized leader of radio frequency/microwave technology in the semiconductor processing industry and in the international magnetic-fusion effort. The Radio Frequency Test and Evaluation facility represents one of the premier facilities in the United States because of its broad range of frequency, power, and diagnostic capabilities.
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Point of Contact for this survey.