Original Date: 11/03/1996
Revision Date: 01/18/2007
Information : Micro-Metrology
Oak Ridge’s Ultraprecision Manufacturing Technology Center has developed a unique capability for performing dimensional metrology of micro-fabricated components. This capability uses techniques such as stylus profilometry, modified video microscopy, and optical interferometry to accurately assess the dimensional variations within micro- fabricated structures.
The various micro-metrology techniques offer engineers a way to accurately measure the dimensions and dimensional variation of micro-fabricated components. Stylus profilometry offers dimensional measurements with better than 0.1-micrometer accuracy over a 250-micrometer range. Modified video microscopy has approximately 2- micrometer accuracy over a non-contact, 5-millimeter range. Optical interferometer has an accuracy of better than 0.1-micrometer for sizes greater than 1 millimeter.
New families of micro-manufactured components and systems will require unique micro-metrology techniques and tools for assuring the manufacturability of components. Micro-metrology techniques will offer engineers the opportunity to evaluate manufacturing processes by assessing specific production parts. During system development, micro-metrology tools will be invaluable for identifying dimensional tolerances and for manufacturing subsystem parts. Overall, micro-metrology will provide engineers with repeatable system assemblies and proper system performance.
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