Original Date: 11/03/1996
Revision Date: 01/18/2007
Information : Thermal Spray Development
Oak Ridge Centers for Manufacturing Technology’s (ORCMT’s) Thermal Spray Technology Center features experienced personnel, state-of-the-art facilities, and thermal spray equipment. Thermal spray capabilities provided by the Center range from corrosion coatings to near-net shape component development.
ORCMT has been investigating thermally-sprayed dielectric materials as coatings for electrostatic chucks for fixturing silicon wafers during high temperature (600°C) vacuum processing. Electrostatic chucks can reduce edge and front-side wafer effects; provide better temperature uniformity and control; improve wafer flatness; and reduce moving parts. ORCMT is developing B4C as a thermally-sprayed coating because of its low thermal expansion, valuable mechanical properties (high hardness, strength and modulus), high melting point, specific heat, and melting enthalpy. However, these advantageous properties also make B4C difficult to apply as a thermal spray.
ORCMT has been investigating thermal spray applications such as beryllium coatings; free-standing and near-net shaped components; in-process control DXT (density x thickness); wear-resistant surfaces; and molten metals containment and processing. Potential applications include low-Z coatings for reactor components; dielectric coatings for tooling applications; protective coatings for containment and processing of molten materials; thermally- conductive coatings for injection molding tooling; wear-resistant coatings for military applications; corrosion- resistant coatings for high-temperature environments and fossil energy applications; and enhanced thermal spray process and materials development.
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