Original Date: 11/03/1996
Revision Date: 01/18/2007

Oak Ridge Centers for Manufacturing Technology’s (ORCMT’s) Thermal Spray Technology Center features experienced personnel, state-of-the-art facilities, and thermal spray equipment. Thermal spray capabilities provided by the Center range from corrosion coatings to near-net shape component development.

ORCMT has been investigating thermally-sprayed dielectric materials as coatings for electrostatic chucks for fixturing silicon wafers during high temperature (600°C) vacuum processing. Electrostatic chucks can reduce edge and front-side wafer effects; provide better temperature uniformity and control; improve wafer flatness; and reduce moving parts. ORCMT is developing B₄C as a thermally-sprayed coating because of its low thermal expansion, valuable mechanical properties (high hardness, strength and modulus), high melting point, specific heat, and melting enthalpy. However, these advantageous properties also make B₄C difficult to apply as a thermal spray.

ORCMT has been investigating thermal spray applications such as beryllium coatings; free-standing and near-net shaped components; in-process control DXT (density x thickness); wear-resistant surfaces; and molten metals containment and processing. Potential applications include low-Z coatings for reactor components; dielectric coatings for tooling applications; protective coatings for containment and processing of molten materials; thermally- conductive coatings for injection molding tooling; wear-resistant coatings for military applications; corrosion- resistant coatings for high-temperature environments and fossil energy applications; and enhanced thermal spray process and materials development.

For more information see the Point of Contact for this survey.